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Micro/Nanofabrication & Manufacturing

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Adhesion Aspects in MEMS/NEMS  
Advanced MEMS Packaging  
Advanced Materials and Nanotechnology  New Title: title added within past 60 days
Advanced Micro and Nanosystems, Volume 7 - LIGA and its Applications  
Basic Chemometric Techniques in Atomic Spectroscopy  
EUV Lithography  
EUV Sources for Lithography  
Handbook of Nanofabrication  
Handbook of Nanotechnology, Nanometer Structures - Theory, Modeling, and Simulation  
Innovative Processing of Films and Nanocrystalline Powders  
Introduction to Nanophotonics  
Lithography Process Control  
MEMS Packaging  
MEMS/MOEMS Packaging - Concepts, Designs, Materials, and Processes  
Microjoining and Nanojoining  
Micromixers - Fundamentals, Design and Fabrication  
Multiscale Simulation Methods for Nanomaterials  
Nano-CMOS Design for Manufacturability - Robust Circuit and Physical Design for Sub-65 nm Technology Nodes  
Nanochromatography and Nanocapillary Electrophoresis - Pharmaceutical and Environmental Analyses  
Nanolithography and Patterning Techniques in Microelectronics  
Nanophotonics and Nanofabrication  
Nanostructure Control of Materials  
Nanostructured Materials, Thin Films and Hard Coatings for Advanced Applications  New Title: title added within past 60 days
Nanostructuring Operations in Nanoscale Science and Engineering  
Optical Scattering - Measurement and Analysis (2nd Edition)  
Optimal Device Design  
Self-Assembly and Nanotechnology - A Force Balance Approach