Description: This book is a must for materials scientists and engineers working with vacuum coating in the invention of new technologies or applications in all industries. It is of special interest to those who work in the semiconductors field.
This is a concise review of the developments that have led to the wide variety of applications of vacuum coater technology in today's world. This book reviews both the technical and the patent literature relevant to the technology. With its many references, this book provides a starting point for more in-depth surveys on what has been done in the past as well as more recent work in all aspects of vacuum coating. The author, Donald M. Mattox, has used his extensive knowledge of vacuum coating technology to draw comparisons and place the information in the proper context for the reader. This is particularly important for the patent literature where the terminology used is often not that used by the technical community.
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